@inproceedings{PetzoldDresbachEbertetal.2006, author = {M. Petzold and C. Dresbach and M. Ebert and J. Bagdahn and M. Wiemer and K. Glien and J. Graf and R. Muller-Fiedler and H. Hofer}, title = {Fracture mechanical life-time investigation of glass-frit bonded MEMS sensors}, series = {Thermal and Thermomechanical Proceedings 10th Intersociety Conference on Phenomena in Electronics Systems, 2006. ITHERM 2006. 30 May - 02 June 2006, San Diego, CA, USA}, publisher = {IEEE}, isbn = {0-7803-9524-7}, doi = {10.1109/ITHERM.2006.1645501}, pages = {1343 -- 1348}, year = {2006}, language = {en} }