@inproceedings{KrauseMarzDresbachetal.2010, author = {Krause, M. and Marz, B. and Dresbach, C. and Petzold, M.}, title = {Electron backscatter diffraction microstructure investigations of electronic materials down to the nanoscale}, booktitle = {3rd Electronic System-Integration Technology Conference ESTC, 13-16 Sept. 2010, Berlin, Germany}, isbn = {978-1-4244-8555-0}, doi = {10.1109/ESTC.2010.5642809}, pages = {1 -- 6}, year = {2010}, language = {en} }