@inproceedings{KrauseMarzDresbachetal.2010,
  author    = {M. Krause and B. Marz and C. Dresbach and M. Petzold},
  title     = {Electron backscatter diffraction microstructure investigations of electronic materials down to the nanoscale},
  series = {3rd Electronic System-Integration Technology Conference ESTC, 13-16 Sept. 2010, Berlin, Germany},
  publisher = {IEEE},
  isbn      = {978-1-4244-8555-0},
  doi       = {10.1109/ESTC.2010.5642809},
  pages     = {1 -- 6},
  year      = {2010},
  language  = {en}
}