@misc{EllingenRohdeStahletal.2023,
  author    = {Elias Ellingen and Markus Rohde and Bastian Stahl and Robert Lange},
  title     = {Fourier scatterometry for compensation of tilt and curvature deviations of two photon polymerization 3d printers},
  edition   = {1.1},
  doi       = {10.24433/CO.3055138.v1},
  institution = {Fachbereich Ingenieurwissenschaften und Kommunikation},
  year      = {2023}
}