TY - CHAP U1 - Konferenzveröffentlichung A1 - Petzold, M. A1 - Dresbach, C. A1 - Ebert, M. A1 - Bagdahn, J. A1 - Wiemer, M. A1 - Glien, K. A1 - Graf, J. A1 - Muller-Fiedler, R. A1 - Hofer, H. T1 - Fracture mechanical life-time investigation of glass-frit bonded MEMS sensors T2 - Thermal and Thermomechanical Proceedings 10th Intersociety Conference on Phenomena in Electronics Systems, 2006. ITHERM 2006. 30 May - 02 June 2006, San Diego, CA, USA KW - fracture toughness KW - crack growth KW - reliability KW - micro chevron SN - 0-7803-9524-7 SB - 0-7803-9524-7 U6 - https://doi.org/10.1109/ITHERM.2006.1645501 DO - https://doi.org/10.1109/ITHERM.2006.1645501 SP - 1343 EP - 1348 S1 - 6 PB - IEEE ER -