@article{HeEschGillner2019,
  author    = {Chao He and Dominik Esch and Arnold Gillner},
  title     = {Adaption of Energy Deposition in Helical Drilling of Multidimensional Micro Holes Using Ultrashort Laser Pulses},
  series   = {Journal of Laser Micro/Nanoengineering},
  volume    = {14},
  number    = {2},
  publisher = {Japan Laser Processing Society},
  address   = {Osaka},
  issn      = {1880-0688},
  doi       = {10.2961/jlmn.2019.02.0010},
  pages     = {173 -- 178},
  year      = {2019},
  language  = {en}
}