TY - JOUR U1 - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed) A1 - Merfort, Christian A1 - Bablich, Andreas A1 - Schwaneberg, Oliver A1 - Watty, Krystian A1 - Boehm, Markus T1 - Multivariate Analysis of a-SiGe:H Multispectral Photodiodes for Proper Band Selection JF - MRS Online Proceedings Library KW - optoelectronic KW - plasma-enhanced CVD (PECVD) (deposition) KW - Raman spectroscopy SN - 1946-4274 SS - 1946-4274 U6 - https://doi.org/10.1557/opl.2012.911 DO - https://doi.org/10.1557/opl.2012.911 VL - 1437 SP - 1 EP - 6 PB - Materials Research Society ER -