TY  - JOUR
U1  - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed)
A1  - He, Chao
A1  - Esch, Dominik
A1  - Gillner, Arnold
T1  - Adaption of Energy Deposition in Helical Drilling of Multidimensional Micro Holes Using Ultrashort Laser Pulses
JF  - Journal of Laser Micro/Nanoengineering
KW  - helical drilling
KW  - ultrashort pulse laser
KW  - energy deposition
KW  - micro  processing
KW  - multidimensional
SN  - 1880-0688
SS  - 1880-0688
U6  - https://doi.org/10.2961/jlmn.2019.02.0010
DO  - https://doi.org/10.2961/jlmn.2019.02.0010
VL  - 14
IS  - 2
SP  - 173
EP  - 178
PB  - Japan Laser Processing Society
CY  - Osaka
ER  -