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Electron backscatter diffraction microstructure investigations of electronic materials down to the nanoscale

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Metadaten
Document Type:Conference Object
Language:English
Author:M. Krause, B. Marz, C. Dresbach, M. Petzold
Parent Title (English):3rd Electronic System-Integration Technology Conference ESTC, 13-16 Sept. 2010, Berlin, Germany
Number of pages:6
First Page:1
Last Page:6
ISBN:978-1-4244-8555-0
DOI:https://doi.org/10.1109/ESTC.2010.5642809
Publisher:IEEE
Date of first publication:2010/11/22
Dewey Decimal Classification (DDC):6 Technik, Medizin, angewandte Wissenschaften / 62 Ingenieurwissenschaften / 620 Ingenieurwissenschaften und zugeordnete Tätigkeiten
Entry in this database:2022/04/14