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Fourier scatterometry for compensation of tilt and curvature deviations of two-photon polymerization three-dimensional printers

  • A Fourier scatterometry setup is evaluated to recover the key parameters of optical phase gratings. Based on these parameters, systematic errors in the printing process of two-photon polymerization (TPP) gray-scale lithography three-dimensional printers can be compensated, namely tilt and curvature deviations. The proposed setup is significantly cheaper than a confocal microscope, which is usually used to determine calibration parameters for compensation of the TPP printing process. The grating parameters recovered this way are compared to those obtained with a confocal microscope. A clear correlation between confocal and scatterometric measurements is first shown for structures containing either tilt or curvature. The correlation is also shown for structures containing a mixture of tilt and curvature errors (squared Pearson coefficient r2 = 0.92). This compensation method is demonstrated on a TPP printer: a diffractive optical element printed with correction parameters obtained from Fourier scatterometry shows a significant reduction in noise as compared to the uncompensated system. This verifies the successful reduction of tilt and curvature errors. Further improvements of the method are proposed, which may enable the measurements to become more precise than confocal measurements in the future, since scatterometry is not affected by the diffraction limit.

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Document Type:Article
Author:Elias Ellingen, Markus Rohde, Bastian Stahl, Robert Lange
Parent Title (English):Journal of Optical Microsystems
Article Number:043501
Number of pages:12
Publishing Institution:Hochschule Bonn-Rhein-Sieg
Date of first publication:2023/11/06
Copyright:© The Authors. Published by SPIE under a Creative Commons Attribution 4.0 International.
Funding:This work was partly supported by the Federal Office of Information Security (BSI, Project BIOLAB), the Institute of Safety and Security Research (ISF) and the Department of Engineering and Communication (DEC) of Hochschule Bonn-Rhein-Sieg.
Keyword:Fourier scatterometry; grating reconstruction; transmission phase gratings; two-photon polymerization
Departments, institutes and facilities:Fachbereich Ingenieurwissenschaften und Kommunikation
Institut für Sicherheitsforschung (ISF)
Institut für Technik, Ressourcenschonung und Energieeffizienz (TREE)
Projects:Biometrie-Analyse-Labor (Biolab)
Dewey Decimal Classification (DDC):6 Technik, Medizin, angewandte Wissenschaften / 62 Ingenieurwissenschaften / 620 Ingenieurwissenschaften und zugeordnete Tätigkeiten
Entry in this database:2023/11/08
Licence (German):License LogoCreative Commons - CC BY - Namensnennung 4.0 International