Refine
H-BRS Bibliography
- yes (4)
Departments, institutes and facilities
Document Type
- Article (2)
- Conference Object (1)
- Research Data (1)
Language
- English (4)
Keywords
- Capsule (1)
- Engineering (1)
- Fourier scatterometry (1)
- Machine Learning (1)
- Machine vision (1)
- grating reconstruction (1)
- long-wave infrared (1)
- micromobility (1)
- neuromorphic processing (1)
- thermal imaging (1)
A Fourier scatterometry setup is evaluated to recover the key parameters of optical phase gratings. Based on these parameters, systematic errors in the printing process of two photon polymerization (TPP) gray-scale lithography 3d printers can be compensated, namely tilt and curvature deviations. The proposed setup is significantly cheaper than a confocal microscope, which is usually used to determine calibrations parameters for compensation of the TPP printing process. The grating parameters recovered this way are compared to those obtained with a confocal microscope. A clear correlation between confocal and scatterometric measurements is first shown for structures containing either tilt or curvature. The correlation is also shown for structures containing a mixture of tilt and curvature errors (squared Pearson coefficient $r^2$ = 0.92). This new compensation method is demonstrated on a TPP printer: A diffractive optical element (DOE) printed with correction parameters obtained from Fourier scatterometry shows a significant reduction in noise as compared to the uncompensated system. This verifies the successful reduction of tilt and curvature errors. Further improvements of the method are proposed, which may enable the measurements to become more precise than confocal measurements in the future, since scatterometry is not affected by the diffraction limit.
Trends of environmental awareness, combined with a focus on personal fitness and health, motivate many people to switch from cars and public transport to micromobility solutions, namely bicycles, electric bicycles, cargo bikes, or scooters. To accommodate urban planning for these changes, cities and communities need to know how many micromobility vehicles are on the road. In a previous work, we proposed a concept for a compact, mobile, and energy-efficient system to classify and count micromobility vehicles utilizing uncooled long-wave infrared (LWIR) image sensors and a neuromorphic co-processor. In this work, we elaborate on this concept by focusing on the feature extraction process with the goal to increase the classification accuracy. We demonstrate that even with a reduced feature list compared with our early concept, we manage to increase the detection precision to more than 90%. This is achieved by reducing the images of 160 × 120 pixels to only 12 × 18 pixels and combining them with contour moments to a feature vector of only 247 bytes.
A Fourier scatterometry setup is evaluated to recover the key parameters of optical phase gratings. Based on these parameters, systematic errors in the printing process of two-photon polymerization (TPP) gray-scale lithography three-dimensional printers can be compensated, namely tilt and curvature deviations. The proposed setup is significantly cheaper than a confocal microscope, which is usually used to determine calibration parameters for compensation of the TPP printing process. The grating parameters recovered this way are compared to those obtained with a confocal microscope. A clear correlation between confocal and scatterometric measurements is first shown for structures containing either tilt or curvature. The correlation is also shown for structures containing a mixture of tilt and curvature errors (squared Pearson coefficient r2 = 0.92). This compensation method is demonstrated on a TPP printer: a diffractive optical element printed with correction parameters obtained from Fourier scatterometry shows a significant reduction in noise as compared to the uncompensated system. This verifies the successful reduction of tilt and curvature errors. Further improvements of the method are proposed, which may enable the measurements to become more precise than confocal measurements in the future, since scatterometry is not affected by the diffraction limit.
